Developer

Developer Overview

A K₂CO₃ (potassium carbonate)-based D/F developer concentrate.
An excellent developer for fine patterns by reducing Resist-Foot residue and suppressing over-development on the side-wall area.

Developer explanation image

Product Name : DC-50

Item Details
Applicable Process Pattern / PSR (Photoresist (PR) developing process)
Product Form Liquid
Applicable Lines MLB, FPC, RF-PCB, HDI

R-COOH +K2CO3 → K+R-COO- + KHCO3
Resist Polymer becomes water soluble by K+ ion ( or Na ion).

Mechanism

Component Role
Potassium Carbonate D/F Resist, PSR INK dissolution
Other Components Liquid catalyst, pH adjustment
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Developer Evaluation Results

Performance (Resist Foot)

To minimize DFR Foot during the developing process, a small amount of hardened DFR residue removal component is required.

Category Sodium Carbonate DC-50
Image

-SEM-

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K2CO3 Potassium Carbonate Concentration Change

1

Consumption due to DFR dissolution
R-COOH + K₂CO₃ → R-COO⁻ K⁺ + KHCO₃
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2

Natural decomposition; contact with carbon dioxide in air in an aqueous state
K₂CO₃ + H₂O + CO₂→ 2KHCO₃
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pH Change by DFR Dissolution Amount

pH change graph by DFR dissolution amount