Integrated Management System

This is a solution for etching process management.

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HWABAEK TECHNOLOGY

Integrated Management System
: A Solution for the Etching Process

Integrated Management System: A solution for the etching process that enables centralized
integrated control and management of various etching facilities for each line.

• Provides functions such as graphic-based real-time system monitoring / control / analysis / reports

• Provides I/F with SI, MES, etc., and process-control devices and systems

• Built-in R-DBMS interface function, allowing flexible use of operational data

• Various system configurations are possible depending on the customer, and monitoring/operation schemes suited to the characteristics are provided

• Can respond to various configurations of the etching line

            Implementation Effects
        

                Integrated Management
                Graphic-based real-time integrated monitoring / management / control
Stable quality control
Reduced maintenance / management costs
Rapid failure response and analysis
Can respond to various system configurations

            

                Data Utilization
                Storage and utilization of historical data
Analysis using real-time and historical data
Various reports (daily, weekly, monthly, yearly)
Management of events (alarms, etc.) and confirmation of results

            

                System Interface
                Interface function with customer systems such as SI and MES
Supports real-time data collection and analysis
Can be used for data accumulation/analysis

            

                Remote Management
                Supports quick identification and resolution of issues
A/S and remote operation management support functions
Provides differentiated algorithms for each customer

            

<Dashboard: Integrated Management by Line>

Integrated monitoring and management for the entire process line
Check operating status, alarms, measurement values, etc.
CCTV screen linkage
Various configurations possible reflecting line characteristics

<Dedicated Management Screen by Device>

Provides screens for each device such as etching systems and supply units
Detailed control/setting functions for each device
Manages setting/control permissions by user level

<Data-Based Analysis>

Register and manage analysis models for each device
Analysis using real-time and historical data
Can be used for correlation analysis, etc.
Provides various functions such as adding analysis models, changing information, and selecting whether to display

<Chemical Usage Statistics>

Analysis of usage by chemical
Provides daily, weekly, and monthly information by default

<Automatic Report Generation/Output>

Automatic report generation using stored data
Provides basic reports: daily/weekly/monthly
Create user-defined reports
Can display graphs, etc. linked with MS Excel
Can select generation time / whether to auto-print

<System Management>

User registration and management by level
Ability to restrict setting/control permissions by level
Provides various system management functions such as communication status management

Features

As integrated management software for systems/devices in the etching process, provides monitoring/control/analysis/reports, etc.
Communication and management functions with each device and system according to the Link system configuration
Real-time data linkage and control to upper-level systems (SI, MES, etc.)
Provides various system configurations and monitoring screens, analysis, and report functions depending on customer characteristics
Enables rapid situation awareness and response to abnormal states based on integrated information
Real-time monitoring management functions to maintain stable etching quality
Reduces maintenance costs and manpower
Enables comprehensive assessment of chemical usage, device availability, and more.
Fast and accurate system management through remote technical support
Rapid actions possible using various added status information (Events)

Functions

Real-time management: Alarm functions and identification of operating/running status and abnormal status of equipment, sensors, etc.
Control: Remote control of all devices according to user level
System operation status analysis functions: Real-time/historical data analysis, correlation analysis, etc.
Provides various basic reports such as daily/monthly/yearly, creates user-defined reports and auto output (Excel linkage available)
Supports interfaces with other systems using standard protocols
Provides various system configurations and monitoring screens depending on customer characteristics
Real-time identification of operating status of lower systems/devices/sensors and alarm functions
Provides various analysis functions such as real-time/historical data analysis and correlation analysis