System Configuration
Overview
It consists of various etching systems, chemical supply/analysis devices, sensors, and an integrated management system that can manage them together.
It provides graphic-based integrated management functions for the etching process.
It manages various operational information of the manufacturing process in a DB and provides an interface to the customer's computerized systems such as MES.
By introducing the latest control platform (software-defined device) concept, hardware reliability has been improved and operation/management methods have been standardized.
Stable process management improves process operation efficiency.
It precisely maintains the chemical composition (concentration) set for each customer, improving etching quality and yield.
By maintaining an appropriate chemical composition, chemical consumption can be reduced.
Each system and device can be operated independently or integrated for operation and management.
Expected Effects
| Real-time integrated management of the entire line is possible, enabling optimal process management at all times and improving operational efficiency. |
| By real-time remote management of process readiness—such as abnormal status of all lines and chemical composition—etching quality and yield are improved. |
| Maintaining an appropriate chemical composition makes it possible to reduce chemical consumption. |
| It is possible to improve the efficiency of manpower operation for maintenance and management. |
| By linking with the customer’s computerized systems, integrated process management and AI analysis are possible. |
Integrated System Management
SI, MES, ERP Integration
Communication and DB-based I/F
Integrated Process Management
Integrated Management Software
Efficient Operation Management
Integrated Operation/Management of Etching Process
Data-based Analysis Function
Reduced Chemical Usage and Improved Yield
Universal Platform
Reliable / High-precision Control
Reliable / High-precision Control
Standardized Operation Management
Algorithm Download Available
Operation Management Support
Remote Technical Support
Create and Manage Various Events for Operating Conditions
Link System Components
| Component | Description |
|---|---|
| Integrated Management System | Software that integrates and manages the entire system |
| Etching System (Cupric Chloride, Sulfuric Acid/Hydrogen Peroxide, Ferric Chloride, etc.) |
Equipped with optimal control algorithms based on customer operating conditions |
| Chemical (Additive) Supply Unit | Supplies chemicals such as etching additives and controls concentration |
| Analysis Unit | Device for analyzing the concentration of supplied chemicals |
| Various Sensors and Transmitters | Sensors based on communication and standard inputs (current, voltage) |
Integrated Management System
Integrated Management of the Entire Etching Line
Data-based Analysis Screen
Integrated Management of the Entire Etching Line
Report
This is integrated management software that can manage the entire etching process.
It provides graphic-based functions such as real-time system monitoring / control / analysis / reporting.
It provides communication with devices and systems installed in the process and an interface to upper systems such as MES (communication, RDBMS, etc.).
Integrated management functions with a client/server configuration; multiple monitoring systems can be 구축 possible.
It includes an R-DBMS linkage function, allowing flexible use of operational data.
Various system configurations are possible depending on the customer, and monitoring/operation schemes tailored to the characteristics are provided.
Expected Effects
Because real-time integrated management of the entire line is possible, optimal process management is always possible and process operation efficiency is improved.
Through real-time remote management of process readiness—such as abnormal status of all lines and chemical composition—etching quality and yield are improved.
Maintaining an appropriate chemical composition can reduce chemical consumption.
Efficiency in manpower operation for maintenance and management can be improved.
By linking with the customer’s computerized systems, integrated process management and AI analysis are supported.
Functions and Features
- System/device integrated management software for the etching process, providing monitoring/control/analysis/reporting functions
- Supports various communication protocols; provides I/F functions with customer networks such as MES and SI
- Provides various system configurations and monitoring screens depending on customer characteristics
- Real-time identification of operation status and alarm functions for subsystems, devices, and sensors
- Provides various analysis functions such as real-time/history data analysis and correlation analysis
- Provides basic reports (daily/monthly/annual) and allows user-defined report creation (Excel linkage)
- Chemical usage analysis and statistical processing
- Provides analysis information to improve quality control and yield
- Messaging functions such as SMS
- Remote monitoring and remote technical support available
